Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514927 | Plasma pre-clean module and process | John Tolle, Robert Vyne, Eric Hill | 2016-12-06 |
| 9474163 | Germanium oxide pre-clean module and process | John Tolle | 2016-10-18 |
| 9299557 | Plasma pre-clean module and process | John Tolle, Robert Vyne, Eric Hill | 2016-03-29 |