Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524874 | Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films | Shyam Sundar Venkataraman, Arend Jouke Kingma, Bastian Marten Noller | 2016-12-20 |
| 9487675 | Chemical mechanical polishing composition comprising polyvinyl phosphonic acid and its derivatives | Vijay Immanuel Raman, Yuzhuo Li, Christian Schade, Shyam Sundar Venkataraman, Sheik Ansar Usman Ibrahim | 2016-11-08 |