Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396912 | Methods for mixed acid cleaning of showerhead electrodes | Armen Avoyan, Hong Shih, John Daugherty | 2016-07-19 |
| 9293305 | Mixed acid cleaning assemblies | Armen Avoyan, Hong Shih, John Daugherty | 2016-03-22 |
| 9245719 | Dual phase cleaning chambers and assemblies comprising the same | Armen Avoyan, Hong Shih | 2016-01-26 |