Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511998 | MEMS device having a getter | Gary O'Brien, Ando Feyh, Gary Yama, Andrew Graham, Bongsang Kim +1 more | 2016-12-06 |
| 9423303 | MEMS infrared sensor including a plasmonic lens | Gary O'Brien, Ando Feyh, Gary Yama, Fabian Purkl | 2016-08-23 |
| 9331264 | Microelectromechanical resonators having degenerately-doped and/or eutectic alloy resonator bodies therein | Farrokh Ayazi | 2016-05-03 |
| 9319020 | Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion | Farrokh Ayazi | 2016-04-19 |
| 9274005 | Device and method for increasing infrared absorption in MEMS bolometers | Gary O'Brien | 2016-03-01 |
| 9236522 | MEMS infrared sensor including a plasmonic lens | Gary O'Brien, Ando Feyh, Fabian Purkl, Gary Yama | 2016-01-12 |