Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524874 | Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films | Shyam Sundar Venkataraman, Eason Yu-Shen Su, Bastian Marten Noller | 2016-12-20 |
| 9487738 | Solidification matrix comprising a carboxylic acid terpolymer | Kerrie E. Walters, Carter M. Silvernail, Juergen Detering, James S. Dailey | 2016-11-08 |