Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9505036 | Portable sonic particle removal tool with a chemically controlled working fluid | Cliff LaCroix, Hong Shih, John Daugherty | 2016-11-29 |
| 9406534 | Wet clean process for cleaning plasma processing chamber components | Kennet Baylon | 2016-08-02 |
| 9396912 | Methods for mixed acid cleaning of showerhead electrodes | Cliff La Croix, Hong Shih, John Daugherty | 2016-07-19 |
| 9390895 | Gas injector particle removal process and apparatus | Cliff LaCroix | 2016-07-12 |
| 9293305 | Mixed acid cleaning assemblies | Cliff La Croix, Hong Shih, John Daugherty | 2016-03-22 |
| 9245719 | Dual phase cleaning chambers and assemblies comprising the same | Cliff La Croix, Hong Shih | 2016-01-26 |