Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452925 | Method of increasing MEMS enclosure pressure using outgassing material | Cerina Zhang, Jongwoo Shin, Joseph Seeger | 2016-09-27 |
| 9428379 | MEMS acoustic sensor with integrated back cavity | Erhan Polatkan Ata, Xiang Li, Stephen Lloyd, Michael Julian Daneman | 2016-08-30 |
| 9344808 | Differential sensing acoustic sensor | Mei-Lin Chan, Michael Julian Daneman, Erhan Polatkan Ata, Xiang Li | 2016-05-17 |
| 9302902 | Integrated heater on MEMS cap for wafer scale packaged MEMS sensors | Goksen G. Yaralioglu | 2016-04-05 |
| 9227842 | Method for MEMS structure with dual-level structural layer and acoustic port | Michael Julian Daneman, Mei-Lin Chan, Fariboz Assaderaghi, Erhan Polatkan Ata | 2016-01-05 |