Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511994 | Aluminum nitride (AlN) devices with infrared absorption structural layer | Julius Ming-Lin Tsai | 2016-12-06 |
| 9487396 | Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices | Fariborz Assaderaghi | 2016-11-08 |
| 9428379 | MEMS acoustic sensor with integrated back cavity | Erhan Polatkan Ata, Martin Lim, Xiang Li, Stephen Lloyd | 2016-08-30 |
| 9344808 | Differential sensing acoustic sensor | Mei-Lin Chan, Erhan Polatkan Ata, Xiang Li, Martin Lim | 2016-05-17 |
| 9299671 | Integrated CMOS back cavity acoustic transducer and the method of producing the same | Fang Liu, Brian H. Kim, Anthony D. Minervini | 2016-03-29 |
| 9227842 | Method for MEMS structure with dual-level structural layer and acoustic port | Mei-Lin Chan, Martin Lim, Fariboz Assaderaghi, Erhan Polatkan Ata | 2016-01-05 |