Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452920 | Microelectromechanical system device with internal direct electric coupling | Matthew Julian Thompson | 2016-09-27 |
| 9452925 | Method of increasing MEMS enclosure pressure using outgassing material | Cerina Zhang, Martin Lim, Jongwoo Shin | 2016-09-27 |
| 9395183 | Micromachined gyroscope including a guided mass system | Ozan Anac | 2016-07-19 |
| 9304155 | Mode-tuning sense interface | Baris Cagdaser, Derek K. Shaeffer | 2016-04-05 |
| 9296606 | MEMS device with a stress-isolation structure | Kirt Williams, Matthew Julian Thompson | 2016-03-29 |