Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324652 | Method of creating a maskless air gap in back end interconnections with double self-aligned vias | Manish Chandhok, Hui Jae Yoo, Yan Borodovsky, Florian Gstrein, Kevin Lin | 2016-04-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324652 | Method of creating a maskless air gap in back end interconnections with double self-aligned vias | Manish Chandhok, Hui Jae Yoo, Yan Borodovsky, Florian Gstrein, Kevin Lin | 2016-04-26 |