Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395408 | System for wafer quality predictive modeling based on multi-source information with heterogeneous relatedness | Jingrui He, Robert J. Baseman | 2016-07-19 |
| 9299623 | Run-to-run control utilizing virtual metrology in semiconductor manufacturing | Robert J. Baseman, Jingrui He, Emmanuel Yashchin | 2016-03-29 |
| 9262255 | Multi-stage failure analysis and prediction | Arun Hampapur, Hongfei Li, Zhiguo Li | 2016-02-16 |
| 9240360 | Run-to-run control utilizing virtual metrology in semiconductor manufacturing | Robert J. Baseman, Jingrui He, Emmanuel Yashchin | 2016-01-19 |