Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9395408 | System for wafer quality predictive modeling based on multi-source information with heterogeneous relatedness | Yada Zhu, Jingrui He | 2016-07-19 | $2,452,000 |
| 9299623 | Run-to-run control utilizing virtual metrology in semiconductor manufacturing | Jingrui He, Emmanuel Yashchin, Yada Zhu | 2016-03-29 | $2,226,000 |
| 9240360 | Run-to-run control utilizing virtual metrology in semiconductor manufacturing | Jingrui He, Emmanuel Yashchin, Yada Zhu | 2016-01-19 | $15,136,000 |