Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466534 | Cointegration of directed self assembly and sidewall image transfer patterning for sublithographic patterning with improved design flexibility | Josephine B. Chang, Michael A. Guillorn, Hsinuyu Tsai | 2016-10-11 |
| 9437443 | Low-temperature sidewall image transfer process using ALD metals, metal oxides and metal nitrides | Michael A. Guillorn, Sebastian U. Engelmann, Hiroyuki Miyazoe, Adam M. Pyzyna, Jeffrey W. Sleight | 2016-09-06 |