Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518151 | Low dielectric constant polymer containing dinaphthyl and hexafluorocyclobutyl ether unit, preparation method and use | Chao Yuan, Kaikai Jin, Yingchun Liu, Shen Diao, Kai Li | 2016-12-13 |
| 9466723 | Liner and cap layer for placeholder source/drain contact structure planarization and replacement | Haigou Huang, Jin Ping Liu, Huang Liu | 2016-10-11 |