Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293365 | Hardmask removal for copper interconnects with tungsten contacts by chemical mechanical polishing | Domingo A. Ferrer, Joyeeta Nag, Wei-Tsu Tseng, George S. Tulevski | 2016-03-22 |