Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406554 | Diffusion barrier layer formation | Brett H. Engel, Arun Vijayakumar, Keith Kwong Hon Wong | 2016-08-02 |
| 9293365 | Hardmask removal for copper interconnects with tungsten contacts by chemical mechanical polishing | Jim Shih-Chun Liang, Joyeeta Nag, Wei-Tsu Tseng, George S. Tulevski | 2016-03-22 |