Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9416451 | Substrate processing device equipped with semicircle shaped antenna | Sung Tae Je, Byung Gyu Song, Song Hwan Park | 2016-08-16 |
| 9368380 | Substrate processing device with connection space | Byoung-Gyu Song, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin | 2016-06-14 |