Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368380 | Substrate processing device with connection space | Il-Kwang Yang, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin | 2016-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368380 | Substrate processing device with connection space | Il-Kwang Yang, Kyong-Hun Kim, Yong-Ki Kim, Yang-Sik Shin | 2016-06-14 |