Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9416451 | Substrate processing device equipped with semicircle shaped antenna | Sung Tae Je, Il-Kwang Yang, Song Hwan Park | 2016-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9416451 | Substrate processing device equipped with semicircle shaped antenna | Sung Tae Je, Il-Kwang Yang, Song Hwan Park | 2016-08-16 |