Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9440327 | Polishing apparatus and polishing method | Yoichi Kobayashi, Katsutoshi Ono | 2016-09-13 |
| 9437507 | Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor | Akira Nakamura, Hiroaki Shibue, Hiroshi Ota, Taro Takahashi, Mitsuo Tada | 2016-09-06 |