Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9457467 | Control device, control method and control program | Hiroshi Fujimoto, Kenji INUKAI | 2016-10-04 |
| 9437507 | Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor | Akira Nakamura, Hiroaki Shibue, Yasumasa Hiroo, Hiroshi Ota, Mitsuo Tada | 2016-09-06 |
| 9272389 | Polishing apparatus and polishing method | Yuta Suzuki | 2016-03-01 |
| 9253083 | Network system | Katsumi Kusama, Atsushi Takahashi, Yasuhiro Terakado | 2016-02-02 |