Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437507 | Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor | Akira Nakamura, Hiroaki Shibue, Yasumasa Hiroo, Hiroshi Ota, Taro Takahashi | 2016-09-06 |