Showing 1–8 of 8 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Kimihiro Fukasawa | Tokyo Electron Limited | 2 |
| 1 | Masato Horiguchi | Tokyo Electron Limited | 2 |
| 3 | Wataru Ozawa | Tokyo Electron Limited | 1 |
| 3 | Atsushi Tamada | Dainippon Screen Mfg. Co. | 1 |
| 3 | Tadashi Aoto | Tokyo Electron Limited | 1 |
| 3 | Chikako Takahashi | Tokyo Electron Limited | 1 |
| 3 | Kazuhiro Kanaya | Tokyo Electron Limited | 1 |
| 3 | Yukio Naito | Tokyo Electron Limited | 1 |