Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520276 | Electrode assembly and plasma processing apparatus | Chikako Takahashi, Takashi Suzuki, Takashi Yamamoto | 2016-12-13 |
| 9455125 | Substrate processing apparatus | Akihiro Yoshimura, Tetsuji Sato, Nobuhiro Wada, Makoto Kobayashi, Hiroshi Tsujimoto +2 more | 2016-09-27 |