Showing 1–6 of 6 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Hiroto Ohtake | Tokyo Electron Limited | 4 |
| 2 | Takashi Aramaki | Panasonic | 2 |
| 2 | Toru Hisamatsu | Tokyo Electron Limited | 2 |
| #4 | Tadashi Kotsugi | Tokyo Electron Limited | 1 |
| #4 | Hiroyuki Takaba | Tokyo Electron Limited | 1 |
| #4 | Shinya Morikita | Tokyo Electron Limited | 1 |
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