Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230821 | Dry etching agent and dry etching method using the same | Tomonori Umezaki, Akiou Kikuchi, Isamu Mori, Satoru Okamoto | 2016-01-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230821 | Dry etching agent and dry etching method using the same | Tomonori Umezaki, Akiou Kikuchi, Isamu Mori, Satoru Okamoto | 2016-01-05 |