Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524877 | Silicon dry etching method | Akiou Kikuchi, Masanori Watari | 2016-12-20 |
| 9238872 | Method for synthesizing fluorine compound by electrolysis and electrode therefor | Akifumi Yao, Akiou Kikuchi, Masaaki Yonekura, Hiroshi Horiuchi | 2016-01-19 |
| 9234133 | Etching gas | Naoto Takada | 2016-01-12 |
| 9230821 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Tomonori Umezaki, Akiou Kikuchi, Satoru Okamoto | 2016-01-05 |