Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524877 | Silicon dry etching method | Isamu Mori, Masanori Watari | 2016-12-20 |
| 9238872 | Method for synthesizing fluorine compound by electrolysis and electrode therefor | Isamu Mori, Akifumi Yao, Masaaki Yonekura, Hiroshi Horiuchi | 2016-01-19 |
| 9230821 | Dry etching agent and dry etching method using the same | Yasuo Hibino, Tomonori Umezaki, Isamu Mori, Satoru Okamoto | 2016-01-05 |