Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431212 | Method for determining the performance of a photolithographic mask | Markus Waiblinger, Thomas Scherübl, Dirk Beyer | 2016-08-30 |
| 9336983 | Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope | Christof Baur, Dajana Cujas, Robert Heberlein, Marion Batz | 2016-05-10 |