Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9336983 | Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope | Michael Budach, Dajana Cujas, Robert Heberlein, Marion Batz | 2016-05-10 |