Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436080 | Method and apparatus for correcting errors on a wafer processed by a photolithographic mask | Vladimir Dmitriev, Ofir Sharoni, Nadav Wertsman | 2016-09-06 |
| 9431212 | Method for determining the performance of a photolithographic mask | Markus Waiblinger, Michael Budach, Thomas Scherübl | 2016-08-30 |