Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377415 | Measuring device for measuring an illumination property | Markus Deguenther | 2016-06-28 |
| 9303975 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Dirk Seidel, Gerd Klose | 2016-04-05 |
| 9297994 | Grating-assisted autofocus device and autofocusing method for an imaging device | Sascha Perlitz, Dirk Seidel | 2016-03-29 |
| 9229209 | Autofocus device and autofocusing method for an imaging device | Mikhail Levtonov, Gerd Klose, Volkmar Betz | 2016-01-05 |