Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303975 | Method for determining the registration of a structure on a photomask and apparatus to perform the method | Michael Arnz, Gerd Klose | 2016-04-05 |
| 9297994 | Grating-assisted autofocus device and autofocusing method for an imaging device | Sascha Perlitz, Michael Arnz | 2016-03-29 |