Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478446 | Load lock chamber | Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2016-10-25 |
| 9442482 | System and method for monitoring wafer handling and a wafer handling machine | Stephen B. Miner, Ryan John Gallagher | 2016-09-13 |
| 9437469 | Inertial wafer centering end effector and transport apparatus | Anthony DiBella, Dennis Poole | 2016-09-06 |
| 9411332 | Automated mechanical handling systems for integrated circuit fabrication, system computers programmed for use therein, and methods of handling a wafer carrier having an inlet port and an outlet port | Isaac Sarek Banner, Stephen B. Miner | 2016-08-09 |
| 9385019 | Overhead substrate handling and storage system | Eric Christensen, Leslie Marshall, Ryan John Gallagher, Stephanie Waite, Gabriel Gaxiola | 2016-07-05 |
| 9368382 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist | 2016-06-14 |
| 9257320 | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication | Stephanie Waite, Stephen B. Miner, John Robinson | 2016-02-09 |
| 9250623 | Methods and systems for fabricating integrated circuits utilizing universal and local processing management | Chinmay Oza | 2016-02-02 |