Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442482 | System and method for monitoring wafer handling and a wafer handling machine | William J. Fosnight, Ryan John Gallagher | 2016-09-13 |
| 9411332 | Automated mechanical handling systems for integrated circuit fabrication, system computers programmed for use therein, and methods of handling a wafer carrier having an inlet port and an outlet port | William J. Fosnight, Isaac Sarek Banner | 2016-08-09 |
| 9257320 | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication | William J. Fosnight, Stephanie Waite, John Robinson | 2016-02-09 |