Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478446 | Load lock chamber | Christopher Hofmeister, Martin R. Elliot, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more | 2016-10-25 |
| 9401294 | Compact substrate transport system | Christopher Hofmeister, Ulysses Gilchrist | 2016-07-26 |
| 9324594 | Workpiece handling modules | John Underwood | 2016-04-26 |