Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383659 | Positioning system, lithographic apparatus and device manufacturing method | Ruud Antonius Catharina Maria Beerens, Andre Bernardus Jeunink, Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Richard Henricus Adrianus Van Lieshout +1 more | 2016-07-05 |