Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9291916 | Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods | Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren, Remi Daniel Marie Edart, Xiuhong Wei, Irina Lyulina +1 more | 2016-03-22 |