Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9477158 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Marcel Beckers, Stefan Philip Christiaan Belfroid, Sergei Shulepov | 2016-10-25 |
| 9429853 | Lithographic apparatus and device manufacturing method | Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more | 2016-08-30 |