Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528185 | Plasma uniformity control by arrays of unit cell plasmas | Sang Ki Nam, Ludovic Godet, Srinivas D. Nemani | 2016-12-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528185 | Plasma uniformity control by arrays of unit cell plasmas | Sang Ki Nam, Ludovic Godet, Srinivas D. Nemani | 2016-12-27 |