Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452506 | Vacuum cleaning systems for polishing pads, and related methods | Paul D. Butterfield, Bum Jick Kim | 2016-09-27 |
| 9358658 | Polishing system with front side pressure control | Takashi Fujikawa, Hung Chih Chen, Paul D. Butterfield | 2016-06-07 |
| 9308623 | Multi-disk chemical mechanical polishing pad conditioners and methods | Hung Chih Chen, Jason Garcheung Fung, Matthew A. Gallelli, Paul D. Butterfield, Kevin Chou | 2016-04-12 |
| 9254547 | Side pad design for edge pedestal | Yin Yuan, Hung Chih Chen | 2016-02-09 |
| 9238293 | Polishing pad edge extension | Chih-Hung Chen, Stan Tsai | 2016-01-19 |