Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452506 | Vacuum cleaning systems for polishing pads, and related methods | Shou-Sung Chang, Bum Jick Kim | 2016-09-27 |
| 9358658 | Polishing system with front side pressure control | Shou-Sung Chang, Takashi Fujikawa, Hung Chih Chen | 2016-06-07 |
| 9308623 | Multi-disk chemical mechanical polishing pad conditioners and methods | Hung Chih Chen, Shou-Sung Chang, Jason Garcheung Fung, Matthew A. Gallelli, Kevin Chou | 2016-04-12 |