Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9308623 | Multi-disk chemical mechanical polishing pad conditioners and methods | Hung Chih Chen, Shou-Sung Chang, Jason Garcheung Fung, Paul D. Butterfield, Kevin Chou | 2016-04-12 |