Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8013299 | Review method and review device | Kenji Obara, Takehiro Hirai, Naoma Ban | 2011-09-06 |
| 7881558 | Scanning microscope | Kazuo Aoki, Kenji Obara | 2011-02-01 |
| 7869969 | Defect review apparatus and method of reviewing defects | Takehiro Hirai, Kenji Obara | 2011-01-11 |