Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069974 | Transport device with a monitoring appliance and substrate treatment apparatus | Reinhardt Bauer, Johannes Struempfel, Matthias Smolke, Thomas Posseckardt, Frank Hupka | 2011-12-06 |
| 8070356 | Method for the temperature measurement of substrates, and vacuum processing apparatus | Thomas Meyer | 2011-12-06 |
| 8007223 | Transport device, loading device and method for loading and unloading the transport device | Johannes Struempfel, Reinhardt Bauer, Hans Hecht, Hartmut Freitag, Heiko Richter +2 more | 2011-08-30 |