Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069974 | Transport device with a monitoring appliance and substrate treatment apparatus | Reinhardt Bauer, Johannes Struempfel, Andreas Heisig, Matthias Smolke, Thomas Posseckardt | 2011-12-06 |