Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070356 | Method for the temperature measurement of substrates, and vacuum processing apparatus | Andreas Heisig | 2011-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070356 | Method for the temperature measurement of substrates, and vacuum processing apparatus | Andreas Heisig | 2011-12-06 |