Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043798 | Method of forming fine patterns | Tsuyoshi Nakamura, Kiyoshi Ishikawa, Yoshiki Sugeta, Toshikazu Tachikawa | 2011-10-25 |
| 7923192 | Base material for pattern-forming material, positive resist composition and method of resist pattern formation | Taku Hirayama, Daiju Shiono, Yohei Kinoshita | 2011-04-12 |
| 7871753 | Positive resist composition and method of forming resist pattern | Takako Hirosaki | 2011-01-18 |