Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057633 | Post-etch treatment system for removing residue on a substrate | Yuji Tsukamoto, Yasuhisa KUDO | 2011-11-15 |
| 8034176 | Gas distribution system for a post-etch treatment system | Yuji Tsukamoto, H. Steven Tomozawa, Sam Yong Kim | 2011-10-11 |
| 8007591 | Substrate holder having a fluid gap and method of fabricating the substrate holder | — | 2011-08-30 |
| 7964058 | Processing system and method for chemically treating a substrate | Jay Wallace, Arthur Laflamme | 2011-06-21 |