Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057633 | Post-etch treatment system for removing residue on a substrate | Thomas Hamelin, Yasuhisa KUDO | 2011-11-15 |
| 8034176 | Gas distribution system for a post-etch treatment system | H. Steven Tomozawa, Sam Yong Kim, Thomas Hamelin | 2011-10-11 |
| 7952049 | Method for multi-step temperature control of a substrate | — | 2011-05-31 |